| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-1942 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-442
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J8-245
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J8-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-24 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-442
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-027
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01J8-24 |
| filingDate |
1996-06-07^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2004-05-31^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
2004-05-31^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-100416629-B1 |
| titleOfInvention |
Method and apparatus for silicon deposition in a fluidized-bed reacor |
| abstract |
The silicon beads 102 are produced by chemical vapor deposition on the particles 102 to be seeds generated inside the CVD reactor 101. [ The reactor 101 comprises a plurality of zones including an inlet zone 116 in which the beads 102 are maintained within the controlled ejection phase and upper zones 118 and 120 in which the beads are contained within the bubbling flow phase. The diminishing region 118 of the upper section 118, 120 separates the beads by size. A system for detecting, classifying and transporting product particles is also described. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9023425-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8075692-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011063007-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8425855-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8235305-B2 |
| priorityDate |
1995-06-07^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |