http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100602319-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01P11-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32678 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3171 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-05 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G21K5-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-05 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01P11-00 |
| filingDate | 2001-07-25^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2006-07-14^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2006-07-14^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100602319-B1 |
| titleOfInvention | Waveguides for microwave excitation of plasma in ion beam guides |
| abstract | An apparatus and method for providing a low energy high current ion beam to an ion implantation device is disclosed. The device includes a mass spectrometry magnet 114 mounted to passages 139 and 202 along the passage 129 of the ion beam, a power source 174 that provides an electric field to the passages 139 and 202, and passages 139 and 202. And a magnetic device 170 providing a multi-cusped magnetic field, and may include a plurality of magnets 220 mounted along at least a portion of the passages 139 and 202. The power source 174 and the magnets 220 cooperatively interact to provide an ECR (electron cyclotron resonance) condition along at least a portion of the passages 139 and 202. Many cusp magnetic fields are superimposed on the dipole magnetic field with specific magnetic field strength in the region of the mass spectrometer passageway, interacting with the known RF or microwave frequency electric field of a given low energy ion beam. The present invention further includes a mass spectrometer waveguide, which combines the electric field and the beam plasma unchanged along the length of the mass spectrometer passageway 202 to improve the generation of ECR conditions. Thus, the present invention provides for the enhancement of beam plasma within a mass spectrometer dipole magnetic field for low energy ion beams without the introduction of externally generated plasma. The invention further includes a method 300 for providing ion beam containment in a low energy ion implantation system as well as an ion implantation system.n n n n Ion Implantation System, Mass Spectrometer, ECR Condition, Waveguide |
| priorityDate | 2000-07-25^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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