http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100689865-B1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16L51-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16J3-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate | 2006-01-27^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2007-03-08^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7180862f2dedf97eb14ed56d988f71f4 |
| publicationDate | 2007-03-08^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100689865-B1 |
| titleOfInvention | Fixing Jig and Leak Check Device for Leak Check of Bellows for Semiconductor Equipment |
| abstract | BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a fixed jig for checking leak of a bellows for semiconductor equipment and a leak check device. The present invention relates to a first cap 20 for covering one end of a bellows 10 to be hermetically sealed, and the other of the bellows 10. A second cap 30 having a discharge port 32 while covering an end portion, and a fastener 11 provided at both ends of the bellows 10 between the first cap 20 and the second cap 30. A fixing jig 100 having a plurality of shafts 40 which are bolted to maintain a constant distance between the bellows 10 while preventing the bellows 10 from contracting; A vacuum line (60) having one end coupled to a discharge port (32) protruding to one side from the second cap (30) of the fixing jig (100); A turbo pump (70) for generating a vacuum pressure to the bellows (10) through the vacuum line (60) while the other end of the vacuum line (60) is coupled; A gas supply unit 80 for injecting helium gas to an outer circumferential surface of the bellows 10; And a detector 90 that measures the amount of helium gas guided through the vacuum line 60 to determine whether the leak is accurate, thereby significantly reducing the number of engineers and man-hours for the engineer, thereby improving process performance. Be sure to |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101175793-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101372527-B1 |
| priorityDate | 2006-01-27^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23987 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419577374 |
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