http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100808081-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-057 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-053 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-1477 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3171 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-05 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-05 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-147 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-317 |
| filingDate | 2004-12-02^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2008-02-28^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2008-02-28^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100808081-B1 |
| titleOfInvention | Ion beam apparatus |
| abstract | An ion beam apparatus according to the present invention comprises a mass separation electromagnet for separating an ion source 2 for extracting an ion beam 4 and an ion beam 4 of a desired mass from the ion beam 4 extracted from the ion source 2 ( 6), a syringe 12 for scanning the incident ion beam 4 in a predetermined scanning center about a predetermined scanning center, and the scanning surface in an arc-shaped deflection region in which an ion beam of desired energy is centered on the scanning center. Holds the electrostatic deflector 3, which electrostatically deflects the ion beam 90 degrees, and a target 50 so as to travel in a direction perpendicular to the cross section, and the target crosses the ion beam emitted from the electrostatic deflector 30 at a predetermined angle. Direction, the injection mechanism 54 which moves the target 50 mechanically and reciprocally. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102111806-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140139407-A |
| priorityDate | 2003-12-04^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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