| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b2b31f8612f522a744762d83c23879ba |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-407
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-127
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-128
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-16 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-12 |
| filingDate |
2006-09-29^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2008-03-05^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f87192624dc80e718b98b4635230e1a3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a200262b8b23e11622d5c6bc6a4207f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2df45de6babf664d3c10e65ee8c7b969
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c146b4bb5d58cd74b013a041b4e7789
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fe600be171626ec6b1e66ba3b095fbfb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fe6ac816651761bf7378499341877a40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8f8e618cee9192f8f153e0bba4d9895f |
| publicationDate |
2008-03-05^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-100809421-B1 |
| titleOfInvention |
Multi-Gas Sensor with Nano-sized Sensing Material and Detection Method Using the Same |
| abstract |
The present invention provides a multi-gas sensor and a sensing method capable of operating at low temperatures and easily distinguishing each reactant gas constituting the multi-gas. The sensor and method include a sensing film including a nano-sized sensing material formed on one side of a semiconductor substrate to react with multiple gases to cause a change in electrical resistance. In addition, it is insulated between the semiconductor substrate and the sensing film is disposed to include the front surface of the sensing film includes a micro-heater for adjusting the temperature of the sensing film and the sensing electrode for contacting both sides of the sensing film, and detects the change in resistance. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/RU-2586446-C1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20190005607-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101155164-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150116210-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9417202-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101649586-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20230010883-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011008043-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2011008043-A2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I382466-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101925000-B1 |
| priorityDate |
2006-09-29^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |