http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100846569-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-0109 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-012 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-07 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00238 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00269 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-02 |
| filingDate | 2006-06-14^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2008-07-15^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2008-07-15^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100846569-B1 |
| titleOfInvention | Package of MEMS element and manufacturing method thereof |
| abstract | The present invention is to provide a package of a MEMS (Micro-Electro Mechanical Systems) device applying a wafer level package (WLP) that can be applied to a batch process of a semiconductor production plant, and a method of manufacturing the same. According to an aspect of the present invention, a plurality of first external portions are provided on a cap wafer, a plurality of bonding bumps formed on the cap wafer, a plurality of alignment bumps formed in alignment with an outer portion of the plurality of bonding bumps, and a portion corresponding to the plurality of alignment bumps. A pad is formed to provide a package of a MEMS device including a wafer for MEMS devices in which the alignment bump and the first external pad are bonded to each other when the cap wafer is bonded to the cap wafer.n n n n Wafer Level Package (WLP), Micro-Electro Mechanical Systems (MEMS) |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101708531-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20150021871-A |
| priorityDate | 2006-06-14^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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