http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100914608-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B55-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-015 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B55-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-015 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate | 2007-10-05^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2009-08-31^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2009-08-31^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-100914608-B1 |
| titleOfInvention | Polishing apparatus and polishing method |
| abstract | Disclosed are a polishing apparatus and a polishing method capable of polishing a polishing object. The polishing apparatus may include a polishing platen, a polishing head portion capable of polishing the polishing object while moving relative to the polishing platen, and includes a cooling portion capable of cooling the portion of the polishing object polished by the polishing platen and the polishing head portion. . Further, the polishing method may improve or improve the flatness of the polishing object by supplying a cooling fluid to a portion of the polishing object while lowering the temperature of the edge region of the polishing object while the polishing object is polished by the polishing platen and the polishing head portion. have. |
| priorityDate | 2007-10-05^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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