http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101013191-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2001-4033 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N15-065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N15-0272 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05B1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N15-00 |
| filingDate | 2009-01-20^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2011-02-10^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2011-02-10^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101013191-B1 |
| titleOfInvention | Particle measuring unit |
| abstract | The present invention relates to a semiconductor device comprising: a housing; An atomizer unit disposed in the housing and in fluid communication with the high pressure DI water line and branched from the high pressure DI water line and atomizing the DI water containing particles, and disposed downstream of the atomizer unit into the housing; A particle having a condensation particle detector comprising a saturator for saturating the particles with a saturated working fluid, a condenser for condensing the particles saturated with the saturated working fluid in the saturator, and a condensation optical counter for counting the condensed saturated particles Provide a measuring unit. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101417755-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101234309-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105115870-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105115870-A |
| priorityDate | 2009-01-20^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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