http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101016835-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32532 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3065 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate | 2004-03-31^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2011-02-22^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2011-02-22^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101016835-B1 |
| titleOfInvention | Plasma processing apparatus and method of using hybrid ball-lock apparatus in the apparatus |
| abstract | The present invention uses a hybrid ball-lock device as a threaded fastener. The components of the fixture are either directly exposed to the plasma as a shield for the remaining parts of the fixture or used as materials to actually improve the plasma properties. The invention also provides a constant electrical and mechanical connection between the components without using any tools. |
| priorityDate | 2003-04-30^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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