http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101192478-B1

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filingDate 2011-06-01^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2012-10-18^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_896571b07da577d008edc986152d26d5
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publicationDate 2012-10-18^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-101192478-B1
titleOfInvention Switching element, micromechanical switch and method for manufacturing micromechanical switch using aligned carbon nanotube array as contact material
abstract Disclosed is a switching element of a micromechanical switch using an aligned carbon nanotube array as a contact material. The switching element of a micromechanical switch using an aligned carbon nanotube array according to an embodiment of the present invention as a contact material is a switching element of a micro-mechanical switch. ); And a CNT contact layer 50 synthesized at each contact between the contact elements 41 and 42 using a carbon nanotube array (CNT array) as a contact material.
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