http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101230207-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2270-0518 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2250-032 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B7-19 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67276 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17D1-04 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate | 2007-02-07^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2013-02-05^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2013-02-05^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101230207-B1 |
| titleOfInvention | Semiconductor Manufacturing Plant |
| abstract | BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor manufacturing plant, wherein a group of fluorine gas generators and a group of semiconductor manufacturing apparatuses 3a to 3e can store a predetermined amount of fluorine gas generated in the on-site fluorine gas generators 1a to 1e. Connected via a gas supply system 2 having a storage tank 12 therein, and when at least one of the on-site fluorine gas generator groups 1a to 1e is stopped, a predetermined amount of fluorine gas is stored. By supplying the fluorine gas from the storage tank 12 to the semiconductor manufacturing apparatus groups 3a to 3e, the operation of the semiconductor manufacturing apparatus groups 3a to 3e is maintained, whereby the fluorine gas generated by the fluorine gas generating apparatus is semiconductor. It can be supplied safely and stably to a manufacturing apparatus, and it is characterized by excellent cost performance in semiconductor manufacturing. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-200469867-Y1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2014137121-A1 |
| priorityDate | 2006-02-07^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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