| abstract |
The present invention is a general formula (1) H n Si (OR) 4-n (1) (Wherein R represents an alkyl group having 1 to 6 carbon atoms, n is an integer of 1 to 3). The presence of a catalyst having a specific chemical structure based on the inorganic phosphate or heteropolyacid structure of the alkoxysilane represented by The present invention relates to a method for producing monosilane and tetraalkoxysilane, which are disproportionated under gas phase. The production method of the present invention is easy to separate from the solvent, the reaction is fast, the conversion rate of the raw material is high. |