http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101410436-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02378 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02529 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02661 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-205 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B29-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C30B25-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02433 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B25-16 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C30B29-36 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-42 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 2011-04-07^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-06-20^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-06-20^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101410436-B1 |
| titleOfInvention | Process for producing epitaxial single-crystal silicon carbide substrate and epitaxial single-crystal silicon carbide substrate obtained by the process |
| abstract | A method for manufacturing an epitaxial silicon carbide single crystal substrate in which a silicon carbide film is epitaxially grown on a silicon carbide single crystal substrate by chemical vapor deposition. In the crystal growth process of this method, the growth temperature is changed up and down between the lower set temperature T 0 and the higher set temperature T 2 with respect to the growth temperature T 1 in the crystal growth main process which occupies the main time of the epitaxial growth And a crystal growing step for carrying out a temperature changing operation for causing the temperature of the epitaxial silicon carbide single crystal substrate to change. |
| priorityDate | 2010-04-07^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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