http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101477661-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-324 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-8828 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-231 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-011 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10B63-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N70-826 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76879 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76883 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76888 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-28 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-324 |
| filingDate | 2008-07-17^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2014-12-31^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2014-12-31^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101477661-B1 |
| titleOfInvention | Tungsten patterns and their pattern formation through tungsten re-growth |
| abstract | A tungsten plug without seam through tungsten regrowth and a method of forming a semiconductor device utilizing the same.n n n A method of forming a seam-free tungsten plug through tungsten re-growth as described above includes forming a tungsten plug layer forming a contact hole in a first insulating layer, regrowing the tungsten plug layer by plasma oxidation or RTA (rapid thermal annealing) A semiconductor structure having wires or electrodes on the re-grown tungsten plug is formed.n n n A tungsten plug without a seam in a fine hole can be used as a path connecting the diode and the lower electrode in forming a phase change memory device, thereby lowering the interfacial resistance to form a soft phase-free phase change memory. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11791259-B2 |
| priorityDate | 2008-07-17^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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