http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101635151-B1
Outgoing Links
Predicate | Object |
---|---|
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H2003-0407 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H2003-023 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-42 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H3-10 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-877 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H9-02574 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-10516 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-073 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-072 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H03H3-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-067 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-09 |
filingDate | 2012-07-25^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2016-06-30^^<http://www.w3.org/2001/XMLSchema#date> |
publicationDate | 2016-06-30^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-101635151-B1 |
titleOfInvention | Piezoelectric device and method of manufacturing piezoelectric device |
abstract | The piezoelectric device of the present application includes a piezoelectric thin film, a functional electrode, a semiconductive layer, and a supporting substrate. The functional electrode is provided on the first main surface side of the piezoelectric thin film and electromechanically coupled to the piezoelectric thin film. The semiconductive layer is composed of a semiconductor material or a mixed material of a metal and an oxide of the metal, and is provided on the second main surface side of the piezoelectric thin film. The support substrate is provided on the second main surface side of the piezoelectric thin film with the semiconductive layer interposed therebetween. |
priorityDate | 2011-07-29^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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