| abstract |
[MEANS FOR SOLVING PROBLEMS] A polymer compound containing a repeating unit represented by the general formula (1A) or (1B) and a repeating unit represented by the general formula (2) in response to a high energy ray or heat. (R 1 represents a hydrogen atom, a methyl group or a trifluoromethyl group. R 2, R 3, R 4 is a monovalent hydrocarbon group, L represents a single bond or a divalent hydrocarbon group, X represents an alkylene group, Z 1 and Z 2, R 5 represents a halogen or an alkyl group, L 'represents a single bond or a divalent organic group, m represents 0 to 3, n represents an integer of 1 to 2, N is 0 to 2, and M + is a sulfonium cation or an iodonium cation) [Effect] When the polymer compound of the present invention is used as a base resin, it has high sensitivity, high resolution and excellent LWR. |