http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101750290-B1

Outgoing Links

Predicate Object
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02636
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66765
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-41733
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0262
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-786
filingDate 2010-06-09^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2017-06-26^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2017-06-26^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-101750290-B1
titleOfInvention Manufacturing method of thin film transistor and manufacturing method of thin film transistor array substrate
abstract More particularly, the present invention relates to a method of manufacturing a thin film pattern and a method of manufacturing a thin film transistor and a thin film transistor array substrate using the same, which simplifies a manufacturing process of a thin film transistor or a thin film transistor, A method of manufacturing a thin film pattern includes aligning a shadow mask having an open area and a blocking area on a substrate; Forming a thin film pattern on the substrate corresponding to the open region through a deposition process using the shadow mask; Removing the shadow mask; And removing a tail portion of the thin film pattern formed in the thin film pattern formation step.
priorityDate 2010-06-09^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425270609
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448528323
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID74765618
http://rdf.ncbi.nlm.nih.gov/pubchem/anatomy/ANATOMYID2415
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69667

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