| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0ba961bfb5c5b958381ba73241ed2ddf |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0453
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J2003-1204 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N23-2251
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03B7-085
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-21
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01J3-12 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01J3-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03B7-085
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-21 |
| filingDate |
2016-05-20^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-09-01^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e907aab59d593892db48c242ddbc4eff
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d3987aa692845c18c0d4eeb86e9dc57e |
| publicationDate |
2017-09-01^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-101773861-B1 |
| titleOfInvention |
Electron Beam Instrument comprising Monochromator |
| abstract |
The present invention is characterized in that a cylindrical electrostatic lens for deflecting the course of an electron beam in a monochromator is arranged symmetrically and an aperture including a plurality of selectable slits is disposed to select an electron beam in a center energy range The present invention relates to an electron beam apparatus having a monochrometer capable of performing spatial resolution and energy resolution by providing a monochrometer having high resolution and excellent maintenance performance by disposing a slit and a circular opening in one aperture in parallel. It has an effect of improving. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021046118-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102495839-B1 |
| priorityDate |
2016-05-20^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |