| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_28653b06af5fe1ea2023d95efc1d6fb0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4ccbe732bad5f52ffde0468a5de122f5 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2253-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D2258-0216 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F25-312
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D47-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-75
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01F5-0413
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D53-261 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01F5-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-75
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D47-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D53-00 |
| filingDate |
2016-06-02^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2017-10-31^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dfbb2b70954469f84445e2a606d77705 |
| publicationDate |
2017-10-31^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-101791478-B1 |
| titleOfInvention |
Treating system of waste gas |
| abstract |
In particular, the present invention relates to a waste gas treatment system, in particular, a waste gas generated in a semiconductor manufacturing process is reacted with steam together with combustion at a high temperature, a combustion gas generated after combustion is reacted with water to collect harmful substances, A waste gas injection pipe 10 connected to a steam injection pipe 11 at one side for the purpose of enhancing treatment performance by filtering by adsorption and enabling continuous treatment; First and second combustion units (20, 30) for burning offgas using micro-electro-magnetic waves and high-temperature plasma; A cooling unit (40) for cooling the combustion gas; A reservoir portion (50) and a mixing portion (70) for collecting and collecting the combustion gas together with water; A suction part (80) for suctioning the residual gas; A waste gas treatment system is provided. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021101444-A3
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102032782-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102032788-B1 |
| priorityDate |
2016-06-02^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |