http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101862070-B1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7fe418c98caa224bdf63a77d15cfb8a2 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D11-005 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D11-026 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32532 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D11-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25D11-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32 |
| filingDate | 2016-12-28^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2018-05-29^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a4349f4e6896102ef8b858e0d1e52851 |
| publicationDate | 2018-05-29^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-101862070-B1 |
| titleOfInvention | A Method for Coating a Sub Block a Remote Plasma Source Block and a Remote Plasma Sub Block Produced by the Same |
| abstract | The present invention relates to a method of coating a sub-block for remote plasma generation and a remote plasma sub-block thereby, and more particularly, to a method of coating a sub-block for remote plasma generation using a plasma electrolytic oxidation coating method, A sub-block coating method for remote plasma generation for coating a sub-block for plasma generation, and a remote plasma sub-block thereby. A method of coating a sub-block for remote plasma generation and thereby a remote plasma sub-block comprising: determining a coating surface in a sub-block for the generation of a remote plasma; Preparing a coating jig for coating the coating surface; Disposing an injection tube in the coating jig for injecting an electrode and an aqueous coating solution into the inner path of the sub-block; And injecting the coating solution into the coating jig to determine the current condition and the application time of the coating solution, wherein the applied current has a voltage density of 0.3 to 50 A / dm < 2 & gt ;, and the application time is at least 10 minutes or more. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200144792-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102205172-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102205173-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200058967-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200144789-A http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102203342-B1 |
| priorityDate | 2016-12-28^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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