| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_969250abacb91193101cfe6a2970295b |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67098
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D125-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16L23-024
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16J3-047
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D7-61
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D163-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F16L51-025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K5-063
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D125-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D7-61
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K5-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/F16L51-02 |
| filingDate |
2018-07-27^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2019-03-29^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_68a4db04882ab68d015932a1a21254f4 |
| publicationDate |
2019-03-29^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-101964006-B1 |
| titleOfInvention |
Manufacturing Method of Metal Bellows in Semiconductor Manufacturing Process |
| abstract |
A method of manufacturing a metal bellows for a semiconductor manufacturing process according to the present invention is a bellows preparation method comprising the steps of preparing a bellows made of a metal material and having a plurality of corrugations formed continuously along the longitudinal direction, ; The flanges being provided at both ends of the bellows so as to be connected to the inner surface of the pipe for exhaust; And a metal ring including a metal ring made of a metal having a higher softening temperature than the material of the bellows so as to contact an inner surface of at least one of the plurality of floors. |
| priorityDate |
2018-07-27^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |