http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102007683-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-202 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-028 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-028 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2012-10-11^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2019-08-07^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2019-08-07^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102007683-B1 |
| titleOfInvention | Chemical amplified photoresist composition |
| abstract | Suzy, Acid generators, and Compound of formula (X) Chemically amplified photoresist composition comprising a. Formula X In Formula X, R 1a , R 2a , R 3a , R 6a , R 7a and R 8a are each independently a hydrogen atom, a hydroxyl group, a carboxy group, -SO 3 , -NH 2 , a halogen atom, a mercapto group, optionally having a substituent C1-C12 alkyl group, optionally a C6-C30 aryl group having substituents, C3-C12 cycloalkyl group optionally having substituents, R 4a and R 5a are each independently a hydrogen atom, a hydroxyl group, a carboxy group, -SO 3 , -NH 2 , a halogen atom, a mercapto group, a C1-C12 alkyl group optionally substituted with C6- optionally substituted Or a C3-C12 cycloalkyl group optionally having a substituent, or R 4a and R 5a are carbon atoms bonding R 4a and R 5a and carbon atoms forming a bond between the pyridine rings; They combine with each other to form a ring. |
| priorityDate | 2011-10-17^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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