| abstract |
Composites are provided for the induced self-assembly patterning technique, which eliminates the need for a separate anti-reflective coating and brush neutral layer in the process. Also provided is a method for induced self-assembly, where a self-assembled material, such as a derived self-assembled block copolymer, is applied directly to a neutral layer of a silicone hardmask and then self-assembled to form the desired pattern. do. Derived self-assembled patterned structures are also disclosed herein. |