http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102154250-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1436 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-3105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K3-14 |
| filingDate | 2013-09-30^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2020-09-09^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2020-09-09^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102154250-B1 |
| titleOfInvention | Polishing composition |
| abstract | It is to provide a polishing composition capable of sufficiently maintaining a high polishing rate for a barrier layer and an insulating film, and suppressing the occurrence of surface defects such as erosion and protrusion. A polishing composition used for polishing an object to be polished having a barrier layer, a metal wiring layer, and an insulating film, and is a polishing composition containing an abrasive grain, an oxidizing agent, a metal anticorrosive agent, a pH adjusting agent, and water. The aspect ratio is 1.22 or less, and in the particle size distribution obtained by the laser diffraction scattering method of the abrasive grains, the particle diameter D90 when the cumulative particle weight reaches 90% of the total particle weight from the fine particle side and the total particles of all particles It is a polishing composition in which the ratio D90/D10 of the particle diameter D10 when reaching 10% by weight is 1.5 or more. |
| priorityDate | 2012-11-02^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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