patent/KR-102161873-B1

Predicate	Object
classificationCPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32715 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68785 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32733 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32568 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32532 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32091 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
classificationIPCInventive	http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-687 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-32
filingDate	2014-05-09^^<http://www.w3.org/2001/XMLSchema#date>
grantDate	2020-10-06^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate	2020-10-06^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	KR-102161873-B1
titleOfInvention	Method and Device for Plasma Treatment of Substrates
abstract	The present invention relates to a device for colliding a plasma with at least one substrate 7 having a first electrode 1 and a second electrode 12 that can be arranged opposite to each other, wherein the electrodes Are formed together to generate a plasma between (1, 12), and at least one of the electrodes (1, 12) is formed from at least two electrode units (2, 3). Additionally, the invention relates to a corresponding method.
priorityDate	2014-05-09^^<http://www.w3.org/2001/XMLSchema#date>
type	http://data.epo.org/linked-data/def/patent/Publication

Predicate	Subject
isDiscussedBy	http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID24553 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523397 http://rdf.ncbi.nlm.nih.gov/pubchem/anatomy/ANATOMYID1969

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