http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102237508-B1
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D5-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-005 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-107 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05B12-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05B3-001 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68792 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67051 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302 |
| filingDate | 2014-06-17^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2021-04-06^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2021-04-06^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-102237508-B1 |
| titleOfInvention | Liquid processing method, liquid processing apparatus and storage medium |
| abstract | A liquid treatment method and the like capable of removing the surface of a hydrophobized substrate are provided. By supplying a hydrophobic liquid to the surface of the rotating substrate W on which the liquid treatment has been performed, hydrophobizing the surface of the substrate, and supplying an alkaline rinsing liquid to the surface of the hydrophobized substrate W to perform rinse cleaning. , Anti-static of the charged substrate W according to the liquid treatment is performed. |
| priorityDate | 2013-06-20^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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