http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102239151-B1

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filingDate 2018-11-19^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2021-04-12^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2021-04-12^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-102239151-B1
titleOfInvention Integrated heater and its manufacturing method
abstract A method of manufacturing a heater includes providing a substrate, forming at least one trench in the substrate, depositing a functional material in the substrate and at least one trench to form a functional element, and electricity in contact with the functional element. And providing a terminal.
priorityDate 2017-11-21^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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