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filingDate 2016-07-08^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2022-03-07^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2022-03-07^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-102371425-B1
titleOfInvention Silicon-containing resin composition
abstract A silicon-containing resin composition capable of forming a silica-based film with suppressed crack generation, a method for forming a silica-based film using the silicon-containing resin composition, and a crack-free silica-based film formed using the silicon-containing resin composition to provide. In a silicon-containing resin composition comprising (A) a silicon-containing resin and (S) a solvent, (A) a cycloalkyl acetate having a specific structure using at least one selected from a siloxane resin and a polysilane as the silicon-containing resin (S) It is made to contain in a solvent. As cycloalkyl acetate, cyclohexyl acetate is used suitably.
priorityDate 2015-07-09^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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