http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102436416-B1

Outgoing Links

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filingDate 2015-04-24^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2022-08-26^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2022-08-26^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-102436416-B1
titleOfInvention Cmp pad construction with composite material properties using additive manufacturing processes
abstract Embodiments of the present disclosure generally provide polishing pads comprising a composite pad body, and methods for forming such polishing pads. One embodiment provides a polishing pad comprising a composite pad body. The composite pad body may include one or more first features formed of a first material or a first material composition; and one or more second features formed of a second material or a second material composition, wherein the one or more first features and the one or more second features comprise the first material or first material composition and the second material or second material composition. It is formed by depositing a plurality of layers comprising
priorityDate 2014-10-17^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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