| Predicate |
Object |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-42 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31691
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02197
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1216 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-314 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01B3-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B13-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C18-12 |
| filingDate |
1998-08-20^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate |
1999-03-25^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-19990023743-A |
| titleOfInvention |
Ferroelectric film forming solution and ferroelectric film formation method |
| abstract |
A solution for forming a ferroelectric film is formed by containing an aqueous solution of acetylacetone and nitric acid in a solution in which an organic metal compound of a metal constituting a ferroelectric is dissolved in an organic solvent. The solution is applied onto a substrate, dried, and sintered to obtain a ferroelectric film. As a result, even when a ferroelectric film such as a PZT or PLZT film containing an element of Periodic Group 2 is formed, a stable ferroelectric film-forming solution is obtained which does not cause precipitation or gelation of crystals and again has little change over time in solution viscosity. A ferroelectric film containing elements of a group and excellent in ferroelectric properties can be easily obtained. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10491019-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100616730-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100621280-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20130111304-A |
| priorityDate |
1997-08-21^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |