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filingDate 1998-06-24^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_af485e32739fbbdffd331bfa3b412706
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publicationDate 2000-01-15^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20000002944-A
titleOfInvention Method and apparatus for producing microcrystal of group III metal element nitride
abstract A method and apparatus for producing fine crystals of nitrides of Group III metal elements, such as gallium nitride (GaN), indium nitride (InN), and aluminum nitride (AlN), as shown in FIG. Ammonia gas is injected into the Group III metal element melt through a gas introduction tube equipped with a rotatable rotary wing to directly chemically react the ammonia gas and the Group III metal element. The microcrystal of can be manufactured.
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