http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20020070786-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_03d0f52bb4069f8a19d70dcfb697c67a |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-031 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-038 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate | 2002-02-07^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_92c31834d8f2cf218af417d89647356b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_011a1a34e0710f341a81c9dd1d273ea7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_61eb1b5009be47cb05392bb6e31476c3 |
| publicationDate | 2002-09-11^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20020070786-A |
| titleOfInvention | Negative resist composition for electron beam or x-ray |
| abstract | Provided is a chemically amplified negative resist composition which is excellent in sensitivity and resolution for the use of electron beams or X-rays, has a rectangular profile, and also reduces roughness and the number of particles in the resist liquid.n n n A chemically amplified negative resist composition containing an alkali-soluble resin, an acid generator, a crosslinking agent crosslinked by an acid, an organic basic compound and an organic solvent, and the crosslinking agent crosslinking by an acid contains 3 to 10 benzene ring atoms in the molecule. It is a phenol derivative which has a molecular weight of 2000 or less, and has one or more hydroxymethyl groups and an alkoxymethyl group in a molecule, respectively, and these are the compounds couple | bonded with at least one benzene ring atom group. |
| priorityDate | 2001-02-08^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
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