http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20040104869-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R29-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01R33-05 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R33-05 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R29-08 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R33-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01F10-13 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01F41-34 |
| filingDate | 2003-06-04^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aefca97ccfb4b4739b95a088095316f3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a1f80979810d60adc57203c9aa00696 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_882f5485a9ca89915a8fb62e5a25e5c6 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4bc10208cb50402bc7f70bd043d3e72b |
| publicationDate | 2004-12-13^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20040104869-A |
| titleOfInvention | The micro fluxgate censor manufactured with Amolphous magnetic core and method for manufacturing the same |
| abstract | The present invention relates to a micro fluxgate sensor manufactured using an amorphous magnetic material as a core, and a method of manufacturing the sensor using a micromachining technique.n n n The micro fluxgate sensor according to the present invention is an amorphous magnetic core made of two bar or square ring shapes, an excitation coil and a coil for magnetic field detection of the amorphous magnetic core, and are deposited on the coil to form a protective film. And a pad for patterning the insulating layer and exposing the coil to the outside.n n n On the other hand, in the manufacturing method of the micro fluxgate sensor according to the present invention, manufacturing a lower coil of the excitation coil and the magnetic field detection coil on the wafer, after depositing a first insulating layer on the lower coil, two bars Manufacturing an amorphous magnetic core having a shape; depositing a second insulating layer on the amorphous magnetic core; manufacturing an upper coil connected to the lower coil to produce an excitation coil and a magnetic field detecting coil; and Covering the top portion with a protective film and exposing the pad.n n n The micro fluxgate sensor manufactured according to the present invention has much improved magnetic field detection sensitivity by using an amorphous magnetic core, and has an effect of being smaller and lighter than the case of manufacturing according to the conventional manufacturing method. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7737687-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100691467-B1 |
| priorityDate | 2003-06-04^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5461123 http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559541 |
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