http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20050097421-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5d5df5e793f74a4e1121e1b2189fc8cb |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-61 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-1702 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N9-266 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-783 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-226 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-14 |
| filingDate | 2004-04-03^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ea594ff9102e2c05fee7acb282c51712 |
| publicationDate | 2005-10-07^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20050097421-A |
| titleOfInvention | Device array for sensing a gas or gas mixture and fabrication method of the same |
| abstract | The present invention relates to an array of gas sensing devices and a method of manufacturing the same. In the present invention, the layout of the heater and the sensing electrodes is improved, so that the shared heater is disposed alone, for example, at a specific position on the substrate. The sensing electrodes are arranged in a line at the top of the structure so that the sensing electrodes are placed in a single area of influence of the shared heater, whereby each sensing electrode maintains a different temperature rise state according to the type of the shared heater. In the aftermath, it is possible to naturally possess different gas sensing characteristics (resistance change characteristics), so that each sensing electrode can have the same effect as having individual heaters even under the condition of sharing one shared heater. Can be induced.n n n In addition, the present invention implements a mechanism that can collectively secure the elevated state of all the sensing electrodes arranged on the substrate, for example, by improving the layout of the heater and the sensing electrodes. By reliably eliminating the need to individually place heaters for raising the corresponding sensing electrodes at the bottom of each sensing electrode under the entire process procedure, the overall product process efficiency is greatly reduced on the manager side, for example, by the individual formation of the heaters. The problem of deterioration, the problem that the overall process cost increases more than necessary by the individual formation of the heaters, and the problem that the overall power consumption is greatly increased by the individual drive of the heaters can be easily avoided.n n n In addition, the present invention implements a mechanism in which a single disposed shared heater can collectively secure the elevated state of all the sensing electrodes arranged on the substrate, and an etching trench region for thermally isolating them from the substrate body; By naturally reducing the size of the occupancy of the common area, it is possible to induce managers to easily avoid the problem of increasing the mechanical vulnerability of the product and the problem of greatly increasing the size of the product. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101135404-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-4102213-A4 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-100843169-B1 |
| priorityDate | 2004-04-03^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID433323431 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID92323602 |
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