http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20070055674-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bf8352f5e3c6aa6dc8b3e8a654e762ef |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32412 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32532 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-08 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-265 |
| filingDate | 2005-11-28^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_320e08556cc0863ce9bcf48f9f2f2521 |
| publicationDate | 2007-05-31^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20070055674-A |
| titleOfInvention | Laser Plasma Pulse Shock Wave Accelerator |
| abstract | The present invention relates to a laser-plasma pulse shock wave accelerated ion implanter used in an impurity ion doping process for conductors, semiconductors, and nonconductor samples, from microscopic specimens to large specimens, from atmospheric pressure to high vacuum. And accelerate the plasma to the electric field type or magnetic field type, which is an ion beam transport system component, and generate a pulse shock wave at the sample surface with another laser beam to inject the accelerated ions into the sample surface. As the surface of the sample is injected into the surface of the sample, the surface of the sample becomes a conductor, and in addition to the ion acceleration velocity, laser-plasma pulse shock wave acceleration in which ions induce deep pulse shock wave acceleration injection into the sample is combined with the voltage applied to the special electrode. It relates to an ion implanter. n n Laser Plasma, Ion Acceleration, Pulse Shock Wave, Ion Implantation, Thermal Diffusion, Insulator-Conductor Phase Transition Theory, Ion Injector |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102364726-B1 |
| priorityDate | 2005-11-28^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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