| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e5081169b8c991da399d70ac59c69101 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-015
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B55-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-015
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-04 |
| filingDate |
2005-12-14^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3eaca9be63bc026b59b38c20eb42ca1e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bd40eab97657cf50c4eaba8c6f8ba9e2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d8a4da980d4fb3bd54e50bd778f52256
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5685e984271aa46026906c0e2bc614bf |
| publicationDate |
2007-06-19^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20070063150-A |
| titleOfInvention |
Polishing plate, polishing device and polishing method using same |
| abstract |
The present invention discloses a polishing plate which is composed of different materials having different thermal expansion coefficients.n n n As described above, according to the polishing table according to the present invention, the flatness of the surface plate can be maintained, the workpiece can be mirror-finished with high efficiency and high precision, and the temperature of the surface plate can be adjusted within a certain range by adjusting the temperature of the cooling water. Because of the control, it is possible to minimize the change of the surface shape due to thermal deformation and to flatten the entire surface of the mirror-polished workpiece. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9279192-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9337277-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9797064-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10002760-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9738991-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180048668-A |
| priorityDate |
2005-12-14^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |