http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20080062964-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b04b7dd8f03481c3952e9e7c54387817 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y15-00 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-127 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-4146 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81C1-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-12 |
| filingDate | 2006-12-30^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f51892e8534a6350697a6ea269380b5d http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ac87a6a639ea082c0948836ded196154 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_676a6c0109b2a8dba7382d196eff120f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a57d95b22f9c3b7de0fc55fe1d028e8d |
| publicationDate | 2008-07-03^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20080062964-A |
| titleOfInvention | Gas sensor using nano material and manufacturing method thereof |
| abstract | Provided are a gas sensor using a nanomaterial and a method of manufacturing the same.n n n A gas sensor using a nanomaterial according to the present invention includes a semiconductor substrate on which a silicon oxide film and a silicon nitride film are sequentially deposited; A heater electrode comprising a plurality of IDE array heater arrays formed on the silicon nitride film; An insulating layer formed on the heater electrode and laminated on portions other than the electrode terminal portion; A sensor electrode formed of a plurality of IDE pattern sensor arrays formed on the insulating layer; A sensing unit formed on the sensor electrode and having nanotubes or nanowires dispersed in electrical contact with the sensor electrode; And an upper protective layer stacked on portions other than the sensing unit and the electrode terminal unit, and the gas sensor according to the present invention can sense various pollutants with high sensitivity as one sensor, and reproducibility of performance. This is excellent. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101050517-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106066347-A |
| priorityDate | 2006-12-30^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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