| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_11a94a4328794cd0957865c96834edfc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d80f1040809503e54509c871ba828f75 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2270-0518
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17C2250-032
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67017 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/F17D1-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67276
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B7-19 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate |
2007-02-07^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_43b8ad54943582cee14df5120f66a454
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8e511356016672b029dd57591cbbdaf4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1bd66e42fbea5d3f360b4ee75da879be
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_31b9078f3637a23223f787c90ea185f1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6a07332a3c12434cba6e6220a81b20a2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_502407ab19f2272c9406be0c38efa67e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cbc428491235b2233eb33ae2b5bf7377
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_86d43326c0a0d700f10d3306770c3b5e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e43a46b6d752358a77e8a85d17ee35c7 |
| publicationDate |
2008-10-20^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20080093150-A |
| titleOfInvention |
Semiconductor Manufacturing Plant |
| abstract |
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a semiconductor manufacturing plant, wherein a storage tank capable of storing a predetermined amount of fluorine gas generated by the fluorine gas generating apparatuses and the semiconductor manufacturing apparatuses 3a to 3e by the on-site fluorine gas generating apparatuses 1a to 1e. A storage tank connected via a gas supply system 2 having a 12 and storing a predetermined amount of fluorine gas when one or more of the on-site fluorine gas generators 1a to 1e are stopped ( By supplying the fluorine gas from the 12 to the semiconductor manufacturing apparatuses 3a to 3e, the operation of the semiconductor manufacturing apparatuses 3a to 3e is maintained, whereby the fluorine gas generated by the fluorine gas generator is safe and stable to the semiconductor manufacturing apparatus. It can also be supplied in the process, and also characterized by excellent cost performance in semiconductor manufacturing. |
| priorityDate |
2006-02-07^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |