| abstract |
The present invention provides salts of formula (1).n n n Formula 1n n n n n n n n In Formula 1, Q 1 and Q 2 are each independently a fluorine atom or a C1-C6 perfluoroalkyl group, T is a methylene group or a carbonyl group, R is a C1-C4 alkyl group, a C1-C4 alkoxy group Is an adamantyl group substituted with one or more substituents selected from the group consisting of a hydroxyl group, a hydroxymethyl group, a cyano group and an oxo group, and A + is an organic counter ion.n n n The present invention further provides a chemically amplified resist composition comprising the salts of Formula 1 mentioned above. |