http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20090105933-A
Outgoing Links
| Predicate | Object |
|---|---|
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-49826 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-0109 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-047 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-042 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-0154 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00317 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-0833 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0051 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-0067 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-00 |
| filingDate | 2008-01-17^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationDate | 2009-10-07^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20090105933-A |
| titleOfInvention | Housings for micromechanical and microoptical components in mobile applications |
| abstract | The present invention relates to a housing for one or a plurality of micromechanical and / or microoptical components, the housing comprising a carrier substrate having at least one micromechanical and / or microoptic component and at least one cover substrate connected to the carrier substrate. Include. The carrier substrate and the at least one cover substrate form at least one cavity that at least partially surrounds the at least one micromechanical and / or microoptical component and at least one opposing the at least one micromechanical and / or microoptical component The face of the cover substrate of at least one includes at least one optical window and at least one mechanical stop. The present invention also relates to a method of manufacturing such a housing, which method can in particular be used for wafer face encapsulation.n n n n MEMS, MOEMS, Micro Mechanical, Micro Optics, Micro Optical Components, Optical Window, Mechanical Stop, Encapsulation |
| priorityDate | 2007-01-18^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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