http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20090128998-A

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filingDate 2008-06-12^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2009-12-16^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20090128998-A
titleOfInvention Array substrate for liquid crystal display device and manufacturing method thereof
abstract The present invention relates to a liquid crystal display device, and more particularly, to an array substrate for a liquid crystal display device and a method of manufacturing the same that can improve the initial investment cost and production yield of equipment.n n n An array substrate for a liquid crystal display device according to the present invention for this purpose includes a gate wiring and a gate electrode configured in one direction on the substrate; A hybrid composite insulating layer covering the gate wiring and the gate electrode and formed of a mixture of a random structure, a ladder structure, and a metal oxide so that the carbon content occupies 8-11%; A semiconductor layer overlapping the gate electrode on the hybrid composite insulating layer; A data line defining a pixel region vertically crossing the gate line on the semiconductor layer, a source electrode extending from the data line and in contact with the semiconductor layer, and a drain electrode spaced apart from the source electrode and in contact with the semiconductor layer and; A passivation layer covering the data line and the source and drain electrodes and including a contact hole to leak the drain electrode; And a pixel electrode connected to the drain electrode on the passivation layer including the contact hole.n n n By forming a hybrid composite insulation layer having a carbon content of 8 to 11% in the above-described configuration, it is possible to substitute a coating apparatus instead of expensive plasma chemical vapor deposition equipment, thereby improving initial equipment investment cost and production yield. There is an advantage.
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