| abstract |
DLC coating apparatus according to the present invention, a vacuum chamber formed by a pressure vessel; A substrate disposed inside the vacuum chamber, on which a workpiece to be coated is disposed; A vacuum exhaust device for discharging air in the vacuum chamber to the outside of the vacuum chamber; A gas supply device for injecting argon (Ar) and acetylene gas (C2H2) into the vacuum chamber; An ion generating device generating ions in the vacuum chamber; And a power supply device supplying a bias voltage to the ion generator and the substrate to form a plasma. |