| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_962adbf7d50e742218f3d536a63df612 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2218-322
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2217-77
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2004-03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2002-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C2218-33
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24355
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2006-42 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-25
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01G9-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01G9-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C8-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B13-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01G15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01G23-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C03C17-27 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B13-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G9-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G23-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01G15-00 |
| filingDate |
2010-03-23^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_75af96293ab60c9613d44db90e66a84c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f14da163148c650968b327bbca2564c1 |
| publicationDate |
2012-02-08^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20120011839-A |
| titleOfInvention |
Formation method of metal oxide film and metal oxide film |
| abstract |
Provided are a method of forming a metal oxide film having a surface unevenness and a predetermined pattern or any one and having less unevenness such as surface resistivity or light transmittance, and such a metal oxide film. A method of forming a metal oxide film having surface irregularities and a predetermined pattern or one side on a substrate, the method comprising: applying a liquid substance containing a metal salt to a substrate to form a metal salt film; And a second step of forming surface irregularities or a predetermined pattern, and a third step of performing a thermal oxidation treatment or a plasma oxidation treatment on the metal salt film to form a metal oxide film. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20210125096-A |
| priorityDate |
2009-03-26^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |