http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20120059400-A

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filingDate 2011-11-28^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_321d114d76108c3dfde0d4c0b5877dde
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e6d2e03f5fb4fad89c6a276323208e81
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publicationDate 2012-06-08^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20120059400-A
titleOfInvention Resist composition, resist pattern formation method, high molecular compound, compound
abstract A resist composition, a method of forming a resist pattern using the resist composition, a novel high molecular compound, and a compound useful as a monomer of the high molecular compound are provided. As a resist composition containing the base component (A) which changes the solubility to a developing solution by the action of an acid, and the acid generator component (B) which generate | occur | produces an acid by exposure, the said base component (A) is a general Resist composition containing resin component (A0) which has structural unit (a0) represented by Formula (a0) [In formula, A is a bivalent coupling group, R < 1> may be a hydrogen atom or a C1-C6 which may have a substituent. Hydrocarbon group; [Formula 1]
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type http://data.epo.org/linked-data/def/patent/Publication

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