| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b3310ea86f3c492f6c09d7be6592866d |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P13-025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-0922
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01P15-097 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01P15-02 |
| filingDate |
2011-03-15^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7bd45f7863a3e2c7e26d5ff9de905eb0 |
| publicationDate |
2012-09-25^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20120105161-A |
| titleOfInvention |
Inertial sensor and method of manufacturing the same |
| abstract |
PURPOSE: An inertial sensor and a manufacturing method thereof are provided to reinforce a connection part between a membrane and a mass body. CONSTITUTION: An inertial sensor(100) includes a membrane(110), a first mass body(120), a second mass body(125), a first post(130) and a second post(135). The first mass body is extended from the lower center of the membrane. The side of the first mass body is a taper shape. The second mass body is extended from the lower part of the first mass body and has a constant cross sectional area. The first post is extended from the lower edge of the membrane. The second post is extended from the lower part of the first post. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101454124-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-101454123-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109506691-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017159979-A1 |
| priorityDate |
2011-03-15^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |