http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20120131491-A

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filingDate 2011-05-25^^<http://www.w3.org/2001/XMLSchema#date>
publicationDate 2012-12-05^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber KR-20120131491-A
titleOfInvention Silicon Carbide Manufacturing Apparatus And Silicon Carbide Manufacturing Method
abstract Silicon carbide manufacturing apparatus and silicon carbide manufacturing method are provided. Silicon carbide manufacturing apparatus includes a reactor for receiving the raw material; A first electrode disposed in the reactor; A second electrode spaced apart from the first electrode; A source supply unit supplying a raw material to the reactor; And a particle collecting unit collecting the particles generated in the reactor.
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