| abstract |
A thin film and a method of patterning the thin film, a thin film transistor substrate, and a method of manufacturing the thin film transistor substrate are provided. The thin film is formed on a base substrate, and comprises a transparent electrode pattern including nanowires and an insulator pattern disposed on the same plane as the transparent electrode pattern and including at least one selected from the group consisting of oxides, chlorides, and fluorides of the nanowires. Include. As a result, display quality and manufacturing reliability can be improved. |