| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_142d981bd6c180968f769e0da8f620da
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_070875329d2add3d65875c6c1b27108a |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02565
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02554
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7869
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02628
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02664
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-24 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| filingDate |
2012-11-30^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0a800f27af95912c12a6c3b34d131310
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1e251a5f1b06b10bb43059f580ac612d |
| publicationDate |
2013-10-24^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
KR-20130116785-A |
| titleOfInvention |
Oxide thin film manufacturing method using low temperature process, oxide thin film and its electronic device |
| abstract |
A method of manufacturing an oxide thin film using a low-temperature process and a method of manufacturing the electronic device are disclosed. The method for manufacturing an oxide thin film according to an embodiment of the present invention includes coating an oxide solution on a substrate and irradiating ultraviolet rays to the coated oxide solution under an inert gas atmosphere. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020257254-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180138500-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20180118964-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170126809-A |
| priorityDate |
2012-04-16^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |