http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20130142710-A
Outgoing Links
Predicate | Object |
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assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_52db8741e86880e9659a8f4139b4038e |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32412 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B21B45-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B11-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0035 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B6-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00 |
filingDate | 2012-06-20^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f216e3b5240b5232ffbb3c52c53862f8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78e9094d9949bb7be08658a9a419845f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3f0c87fab436aa8b9cff44a5b14ea5f7 |
publicationDate | 2013-12-30^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | KR-20130142710-A |
titleOfInvention | Plasma ion separation and accelerated cleaning method and apparatus |
abstract | The present invention relates to a method and an apparatus for effectively cleaning the surface of a cleaning object in which an organic substance, an organic compound and an inorganic substance or an inorganic compound are mixed by using ions in a plasma state. The plasma ion separation and acceleration cleaning apparatus according to the present invention includes a plasma generator and a magnetic field forming means. The plasma generator generates plasma ions for cleaning the surface of the object and discharges them toward the object, and has an outlet for discharging ions of the plasma state. The magnetic field forming means is for separating the ions in the plasma state discharged from the outlet of the plasma generator into cations and anions to collide with the surface of the object, and generating a magnetic field in the direction perpendicular to the traveling direction of the ions in front of the outlet of the plasma generator. It is installed to form. Plasma ion separation and accelerated cleaning apparatus according to the present invention can effectively clean the surface of the object to be mixed with organic or organic compounds and inorganic or inorganic compounds by separating the plasma ions into cations and anions. |
priorityDate | 2012-06-20^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Predicate | Subject |
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isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419512635 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID962 http://rdf.ncbi.nlm.nih.gov/pubchem/anatomy/ANATOMYID1969 |
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