http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140031355-A
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d3163957db744d0171ae3ff8ab14f0d5 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-357 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-205 |
| filingDate | 2014-02-12^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b124ba9d45ea81d5651fc090e725cd01 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e1752a8b5bf611ed6fd8128e762ace5e |
| publicationDate | 2014-03-12^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | KR-20140031355-A |
| titleOfInvention | Plasma sources including belt-type magnets |
| abstract | The present invention relates to a plasma generating source and its application, which generates a uniform high-density plasma at a high degree of vacuum, and the plasma generating source is formed by a thin film deposition including a sputtering apparatus, a neutral particle beam generating source, a sputtering apparatus and a neutral particle beam generating source To obtain a high-quality thin film. According to the present invention, the above object can be achieved by interlocking the magnetic field generated by the pair of the belt-shaped magnets with the microwave generated by the microwave irradiation device. |
| priorityDate | 2014-02-12^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
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